Please find photographs of the SCI FIlmTech-4000 and our visit to SCI in Carlsbad CA (north of San Diego) last week in the News section of the web site; www.edemaray.com. Please see http://www.SCI-soft.com for information about their wide band duel probe ellipsometer which appears to be able to measure our high index films and "sub-wavelength" graded index AR films. It is of great interest both to the ARPAE project and also commercial applications that we are able to directly measure film and sub-layer or graded alloy n and k values and profiles to correlate with process conditions. As you might also imagine it is also a concern that a very highly effective anti-reflection film might be difficult to measure with any reflection method! The SCI may even provide a basis for waveguide testing.
Nobby and I carried 200mm calibration wafers, including both pure films and step deposited alloy samples, up to 18 layers of binary films of TiO2, Al2O3 and SiO2 for evaluation. Chris measured our pure SiO2 reference film and surprised us with higher than expected film thickness and rate of deposition from the Tango metallic Silicon target.
Emad Zawaideh (SCI President) and Chris Claypool (SCI CTO) ran several of our samples with the configuration of the system we are purchasing. They discussed training, service films in the next two months and also writing software to help us with our unique metrology requirements. According to Emad and Chris, the FT4000 could ship as early as 4 weeks to Tango. Ravi will make room in the Tango demo lab and we can close the loop, so to say, between process and measurement. We will have a very unique capability with processes ready for Tango production tools.
Nobby completed essentially a single source inspection and has authorized the purchase of the FT4000 by UCSC for delivery and operation at Tango in 4 ot 5 weeks. In the mean time they will run our samples and we will make several more trips for training and to measure films made in August and September for the binary and ternary film deposition milestones.
Both Nobby and I felt we had a very successful visit and had found colleagues as well as vendors.
Also, look for new data from Nobby's group at NASA-ASL on the barrier performance of our binary alloy for corrosion protection from steam heat. It concludes that AR films with alloys of our high n films will offer superior and failure free performance for encapsulation as well as AR. They will not suffer from wet shifts as do other AR films. We will be the first to publish this talk which will be given this coming Sunday. Look for it again in the News section of the web site.